Reliability of RF MEMS switches at cryogenic (liquid He) temperatures

Reliability of RF MEMS Switches at High and Low Temperatures: Modeling, Simulation and Experiment

This paper examines the reliability of RF MEMS switches when operational temperatures in the range -60C to 100C are envisioned. The basic operation of a capacitive MEMS switch is described and two tools to examine device reliability, modeling and on-chip experimentation, are discussed for the case of capacitive MEMS switches. 1-D, 2-D and 3-D models are presented with emphasis on 3-D coupled-fi...

Reliability of Capacitive RF MEMS Switches at High and Low Temperatures

Some applications of RF MEMS switches, such as aircraft condition monitoring and distributed satellite communication, present a unique challenge for device design and reliability. This article examines these switches when operational temperatures in the range 60°C to 100°C are envisioned. The basic operation of a capacitive MEMS switch is described and two tools for examining device reliability...

RF MEMS Switches

An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.

Time Characterization of Capacitive Mems Rf Switches

Modeling and Fabrication of RF MEMS Switches

MicroElectroMechanical Systems (MEMS) are becoming increasingly important. The benefits of MEMS include small size, low weight, and low cost. In addition, Radio Frequency MEMS switches offer low insertion loss, high quality factor, low power, high isolation, and broadband frequency performance. Modeling of electrostatically-actuated, capacitive switches is reviewed and fabrication steps are des...